The acceleration sensor is a basic unit of a Microstructure Probe (MSS). To determine the level of vibration during the profiling process, the MSS probe is equipped with a highly sensitive vibration control sensor. The vibration control sensor measures the horizontal acceleration of the profiler in one direction using a piezoceramic element. Horizontal acceleration of the profiler generates a lifting force at a cantilever construction inside the ACC-sensor. The lifting force and thus the output of the sensor is proportional to the acceleration.
The ACC-sensor is mounted inside the probe. At the bottom of the ACC housing is a mounting thread M4. Inside the brass cylinder is the piezo element and a tiny SMD preamplifier for the amplification of the ultra high impedance sensor signal.
Technical data:
- Dimension: 10 mm diameter, 70 mm lenght
- Material: Brass
- Response time: 4 ms
- Principle: Piezo element
- Used for: MSS60, MSS90, MSS90L, MSS90LH, MSS90D, MSS90DH, MSS90DM, MSS90DMH