The acceleration sensor is a basic unit of a Microstructure Probe (MSS). To determine the level of vibration during the profiling process, the MSS probe is equipped with a highly sensitive vibration control sensor. The vibration control sensor measures the horizontal acceleration of the profiler in one direction using a piezoceramic element. Horizontal acceleration of the profiler generates a lifting force at a cantilever construction inside the ACC-sensor. The lifting force and thus the output of the sensor is proportional to the acceleration.

The ACC-sensor is mounted inside the probe. At the bottom of the ACC housing is a mounting thread M4. Inside the brass cylinder is the piezo element and a tiny SMD preamplifier for the amplification of the ultra high impedance sensor signal.

Technical data:

  • Dimension: 10 mm diameter, 70 mm lenght
  • Material: Brass
  • Response time: 4 ms
  • Principle: Piezo element
  • Used for: MSS60, MSS90, MSS90L, MSS90LH, MSS90D, MSS90DH, MSS90DM, MSS90DMH

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